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Plasma cleaning machine glow discharge principle

Author： Shenzhen three and wave of Electrical and Mechanical Technology Co., LtdIssuing Time：2017-08-03 08:59:39Pageviews：4461【smallmediumbig】

Plasma cleaning / etching machine to produce plasma device is set in the sealed container two electrodes to form an electric field, with a vacuum pump to achieve a certain degree of vacuum, with the gas more and more thin, molecular spacing and molecular or ion free movement distance Are increasingly long and subjected...
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Plasma cleaning / etching machine to produce plasma device is set in the sealed container two electrodes to form an electric field, with a vacuum pump to achieve a certain degree of vacuum, with the gas more and more thin, molecular spacing and molecular or ion free movement distance Are increasingly long and subjected to electric fields that collide with each other to form plasmas that are highly active and have enough energy to destroy almost all chemical bonds that cause chemical reactions on any exposed surface, and that different gases have different Chemical properties, such as oxygen plasma has a high degree of oxidation, can oxidize the photoresist reaction to generate gas, so as to achieve the effect of cleaning; corrosive gas plasma has a good anisotropy, so that can meet the etching The need. The use of plasma treatment will be issued glow, so called glow discharge treatment.

Glow discharge, the discharge of the two poles under the action of the electric field, electrons and positive ions were to the anode, the cathode movement, and accumulation in the vicinity of the two poles to form a space charge area. Since the drift velocity of the positive ions is much smaller than that of electrons, the charge density of the positive ion space charge region is much larger than that of the electron space charge region, so that the voltage between the entire electrode is almost entirely concentrated in the narrow region near the cathode. This is a significant feature of glow discharge, and in normal glow discharge, the voltage between the two poles does not vary with current.
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